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Sputtering Targets

Home » Products » Thin-Film Materials » Sputtering Targets

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Sputtering Target Venn Diagram

Indium Corporation has mastered the art of building targets with copper, indium, and gallium. We specialize in copper-indium-gallium (CIG) targets, as well as binary alloy targets like Cu-Ga and Cu-In and elemental targets like pure indium. All targets are made to order, per customer specifications. Indium Corporation offers rotary and planar sputtering targets in almost any shape or size required for your application.

  • Sputtering Target Bonding
  • Reclaim and Recycle
  • Rotary Targets
  • Planar Targets

Top Sputtering Targets Technical Documents

  • Physical Constants of Pure Indium (Letter)

    Application Note

  • Indalloy® 4 (Indium)

    MSDS

Sputtering Targets Technical Documents

Whitepapers

Request This Document

A Room Temperature, Low-Stress Bonding Process to Reduce the Impact of Use Stress on a Sputtering Target Assembly

Authors: Amanda Hartnett, Jacques Matteau, Omar Knio, Ronnie Spraker

Posted on 19 Apr 2011

Request This Document

Low-Melting Metallic Sputtering Targets Bonded At Room Temperature (Ambient)

Authors: Jim Hisert, Thomas Acchione

Posted on 21 Jan 2011

Request This Document

Stress-Free Bonding of Large Linear Sputtering Targets for LCD Displays

Authors: A. Duckham, D.B. Deger, D.M. Lunking, E.L. Walters, H.B. Parker, J.E. Newson, M.A. Curran, N.G. Piegari, T.J. Acchione

Posted on 10 Mar 2010

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Application Notes

CVD vs. PVD Advantages and Disadvantages (Letter) (A4)
Physical Constants of Pure Indium (Letter)

Product Data Sheets

Cu/In/Ga Target (Letter) (A4)
OnSpec® CIG Alloy Sputtering Targets (Letter) (A4)
Pure Indium Sputtering Targets (Letter)

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Material Safety Data Sheets

Aluminum with Alloys
Brass Alloy
Copper and Silver Alloy Mixture
Copper Metal
Gold Containing Alloys
Indalloy® 170 (Lead)
Indalloy® 193
Indalloy® 4 (Indium)
Indalloy® Indium with Tin, Lead or Silver
Indalloy® with Lead and/or Tin and/or Silver and Antimony
Indalloy® with Tin, Lead and/or Silver and/or Copper
Indium Mixed with Metal Alloys (Lead-Free)
Tin Double Clad Alloy with Silver
Antimony
Cadmium Containing Metals
Copper Mesh with Metal Alloys
Gallium Containing Metals
Indalloy® 128 (Tin)
Indalloy® 176 (Zinc Metal Mix)
Indalloy® 207
Indalloy® Containing Indium with Tin, Lead, Silver, Copper
Indalloy® Tin and Lead Only
Indalloy® with Lead, Zinc and Antimony
Indium Clad with Aluminum
Tin Based Alloys (No Lead)
Zinc Metal Alloy Mix

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Other Documents

Rotary and Planar Sputtering Targets (Other)

Sputtering Target Blog Posts

The Perfect Sputtering Target Bond

Thursday, May 23, 2013 by Jim Hisert [view bio]

Why do we care so much about target bonding? This is important because a sputtering target that truly performs will allow greater process flexibility, and higher throughput. An introduction from Eliminating Bond Stresses of Sputtering Targets at Operating Temperatures: “…It was observed…

Bonded Sputtering Targets are a Bi-Metallic Assembly

Tuesday, May 21, 2013 by Jim Hisert [view bio]

Whenever two materials with different coefficient of thermal expansion values are bonded together, they will expand and contract as the temperature changes. Assuming these two materials are bonded rigidly, there are two things that can happen as the temperature changes: 1) the bond will break apart…

High Temperature (Braze Alloy) Sputtering Target Bonding, with NanoFoil®

Tuesday, May 14, 2013 by Jim Hisert [view bio]

In an earlier post I mentioned one of the presentations we gave at the 2013 SVC TechCon. The other presentation that our team delivered at the show (presented by Jacques Mateau) regarded another very interesting topic. The paper, High Temperature, Pb-Free, Metallic Sputtering Target Bonding…

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Bill Jackson

This page is owned by:

Bill Jackson
Director, Solar Products
bjackson@indium.com

INDIUM CORPORATIONwww.indium.comaskus@indium.comPRC +86 (0)512 628 34900SINGAPORE +65 6 268 8678UK +44 (0) 1908 580400USA +1 315 853 4900

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