Sputtering Target Bonding

NanoFoil^® and NanoBond^® simplify the sputtering target bonding process, allowing target bonders and target manufacturers to make reliable and repeatable bonds while increasing margins and lowering capital expenditures.

Features of NanoFoil^® in Target Bonding:

• Room temperature bonding
• Uniquely well-suited to bonding materials with dissimilar CTEs
• Lowers overall cost of solder bonding process: materials, capital expenditures, and personnel
• Uniform bondline thickness
• Compatible with any solder
• Minimized stress from CTE mismatch
• Adopted for bonding applications requiring the higher precision demanded by the semiconductor industry
• Minimal voiding – up to 99% coverage
• Lowers overall cost of materials, capital expenditures, and personnel
• Any size target can be NanoBonded

Globally, target manufacturers, bond shops, and end users have realized the potential of NanoBonded sputtering targets.

NanoFoil^® significantly improves existing planar target bonding methods through the use of localized heat. When activated, NanoFoil^® delivers localized heat that bonds similar or dissimilar materials in just a fraction of a second, in any environment, therefore eliminating the need for a standard furnace, torch, or laser. The rapid and versatile nature of this novel bonding method offers process cost reductions over traditional bonding methods.

NanoBonding results in Flat & Parallel Assemblies

Residual stresses and deflections from NanoBonded targets are an order of magnitude less than conventional bonding [Von Mises Stress (MPa)].

NanoBond^® produces a strong, flat, low stress bond that is highly thermally and electrically conductive. NanoFoil^® works by acting as a local heat source to melt adjacent solder layers without heating the target or backing plate materials. This allows the bonding of nearly any combination of sputtering target material and backing plate material, including ceramics to metals, irrespective of the difference in coefficient of thermal expansion (CTE). This process, called NanoBond^®, requires no expensive equipment and can be integrated into any process.

NanoBond^® Services:

Indium Corporation offers NanoBonding services in our target bond shop located in Utica, NY. Let our team of trained, professional target bonders NanoBond^® your targets. We routinely bond targets for the solar and semiconductor industry.