Sputtering Targets

Rotary Targets

Indium Corporation has mastered the art of building targets with copper, indium, and gallium.

Features & Benefits

High Throughput

Cylindrical, rotatable sputtering targets increase material utilization and system throughput while reducing the total cost of ownership. The cylindrical, rotatable shape offers greater than 70% material utilization with less system downtime and high system throughput.

Rotary Targets

The targets are made by Indium Corporation’s proprietary vertically integrated process utilizing aerospace powder metallurgy technology. The production process output results in a consistently homogeneous alloy, with low contaminate levels and consistent density throughout the target.

Typical Dimensions

Length: 304.8 - 3200mm
(12 - 126 inches)
Diameter: 76.2 - 152.4mm
(3 - 6 inches)
Thickness: 3.175 - 15.0mm
(0.125 - 0.591 inches)

Indium Corporation offers targets with the following alloys:

Copper-Indium-Gallium

CIG alloy targets have very low levels of impurities, which enable the manufacture of high efficiency solar cells. This is because we can control the impurity levels before and during our manufacturing process.

Targets can be used in reactive or non-reactive modes. Using fully alloyed targets with various Cu/III and Ga/III ratios enable grading of the deposited CIG chemical composition. This replicates the process used for manufacturing high-efficiency solar cells.

Copper-Gallium

The targets can be produced in chemistry ranges from 50% to 80% Cu atomic weight, with Ga making up the balance of the alloy. They are produced as a monolithic material, bonded onto the backing tube during Indium Corporation’s unique hybrid consolidation process.

Indium

High-purity indium targets for co-deposition, reactive sputtering, or simply applying a layer of indium.

Copper-Indium

Custom-made to your purity, dimensions, and atomic or weight ratios.

Copper-Indium-Gallium Target Copper-Gallium Target Indium Target

Superior Quality

  • Capability to analyze and control impurities to the part per billion levels.
  • Tightly controlled Fe, Ni, Zn, Cd, and Hg enable higher solar conversion efficiency.
    • Hg=10 ppm max*
    • Fe=10 ppm max*
    • Ni=10 ppm max*
    • Zn=10 ppm max*
    • *Typical values. Higher purities are available upon request.
  • Alloys available with Cu/III ratios 0.1 - 0.99 and Ga/IIIratios 0.2 - 0.3.
  • The targets are securely packed to avoid contamination and damage during shipment. Custom packaging is available on request.